On the angular dependence of focused laser ablation by nanosecond pulses in solgel and polymer materials

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On the angular dependence of focused laser ablation by nanosecond pulses in solgel and polymer materials

Focused laser ablation by single laser pulses at varying angles of incidence is studied in two materials of interest: a solgel ~Ormocer 4! and a polymer ~SU8!. For a range of angles ~up to 70° from normal!, and for low-energy ~,20 mJ!, 40 ns pulses at 266 nm wavelength, the ablation depth along the direction of the incident laser beam is found to be independent of the angle of incidence. This a...

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ژورنال

عنوان ژورنال: Applied Physics Letters

سال: 2004

ISSN: 0003-6951,1077-3118

DOI: 10.1063/1.1655702